KV-300 Tabletop film thickness tool with vision for measuring transparent films of thickness up to 500 um
KF-10 Tabletop film thickness tool for measuring transparent films of thickness up to 160 um.
L-2 Manual tabletop film thickness tool for measuring transparent films of thickness up to 150 um.
Si-81 Tabletop metrology tool for measuring Si, GaAs, resist, ... of thickness range 20 um to 500+ um (Si) or > 1 mm of resist. Ideal for process control of backthinned Si.
Inline Above products are also available in component form to allow easy integration or clustering with other tools. Very compact design enables in-process metrology.
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