웨스트팩

인사말

웨스트팩 > 제품소개 > Semiconductor/ LED Solution
 
 Foothill Instruemnts
Foothill Instruments manufactures metrology systems for semiconductor, MEMS, optical, and related markets.

Our film thickness products are capable of measuring up to 500 microns of dielectric.

Our wafer thickness products measure thinned silicon and very thick dielectrics.

     
     
    KV-300
    Tabletop film thickness tool with vision for measuring transparent films of thickness up to 500 um

    KF-10
    Tabletop film thickness tool for measuring transparent films of thickness up to 160 um.

    L-2
    Manual tabletop film thickness tool for measuring transparent films of thickness up to 150 um.

    Si-81
    Tabletop metrology tool for measuring Si, GaAs, resist, ... of thickness range 20 um to 500+ um (Si) or > 1 mm of resist.  Ideal for process control of backthinned Si.

    Inline
    Above products are also available in component form to allow easy integration or clustering with other tools. Very compact design enables in-process metrology.


    로고 COPYRIGHT 2011,WESTPAC ALL RIGHT RESERVED