웨스트팩

 
Wafer Roughness Measurement

FM-Ra

White Light Interferometry
  >Short Coherence length
    
~ 3um coherence envelope
   
Allows high slope measuremen
        -Combined with phase measurement
    
High resolution
        -
~0.3 um/fringe phase sensitivity
        -
~3 um/fringe coherence sensitivity

   
 



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