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ELRC
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Repair, refurbish, service, and supply maintenance tooling for Cymer lasers series 5000, 6000, and 7000 series.
- ELRC provides a low cost solution for laser
operations
- Provide ALL parts necessary for your 5000, 6000
generation Cymer lasers
- Parts available for laser frame 7000 now and consumable
modules are to be ready by early 2012.
- Provide the parts, services, tools and training to be
your complete source for Cymer laser support.
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Environics
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- Fast Loop Design
- Teflon Rotary Valves
- Minimal Dead Volume
- Rapid Sample Switching
- User Defined Sample Sequencing
- Quick Connects for New Samples
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PR Coater & Developer
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| Automatic Coater/Developer/Bake system
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Wafer Flatness Measurement
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- Si, Sapphire, GaAs, SiC, GaN, LN, Quartz etc
- Sawing, Lapping, Polishing
- Process Development and IQC&OQC
- UltraSort150&200, FM200Wafer, FM-MSP300
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Mask(Reticle) Flatness Measurement
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- Quartz(Glass) non-contact flatness measurement system
- Blank, Pellicle mounted mask and EUV mask
- FM200Mask, UltraFlat
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