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웨스트팩 > 제품소개 >
ENERGETIQ
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제품명
리스트 게시판
ENERGETIQ
20 watt EUV source
Unique patented electrodeless Z-Pinch technology
- Low debris / low consumable cost > 10 kHz pulse rate - Enables high volume manufacturing (HVM) simulation > Small plasma size - Below 1mm diameter
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