NanoTrimmer
The Trimming Module is based on our PVD cluster tool architecture
AMSytems supplies several configurations of the Trimming system:
Single trimming module with semi-manual load
Single trimming module with fully automated load
Trimming System with up to 4 Trimming Modules or any required configuration of the trimming modules and PVD/IBD modules on the same platform with up to 2 Cassette Modules
A computer running standard Microsoft Windows software allows users to easily and intuitively operate the system.
The use of standardized modules and components minimizes the variety of additional parts required since many parts are interchangeable. 

Features:
7X improvement of thickness uniformity per single pass
20X ultimate thickness uniformity improvement
Throughput of up to 8 wafers per hour
Close to Zero minimum thickness loss if needed (patent pending)
Film thickness distribution adjustment to +/- 4A
Surface Roughness Improvement
Advantages:
Simple and robust transfer mechanism
DC based Ion Source - no filaments, no grids, simple maintenance
Millisecond response time
Zero minimum etch rate - does not require extra material deposition, and results in no degradation of the device
Thickness adjustment - of any Conductive and Non-conductive films
Cluster Tool combines Trimming Module and PVD Module for robust and economically advantageous approach to high scale manufacturing of FBAR/SAW devices