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Corning Tropel
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- Surface Flatness Measurement System
- Industrial Metrology
* Flat Master, MSP
- Semiconductor
* Flat Master, UltraSort, UltraFlat
- www.corning.com
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Foothill Instruments
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Film Thickness Measurement System
www.foothill-instruments.com
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EUV Technology
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EUV Mask Reflotmeter System
EUV Outgoing Gass Analyzer System
www.euvl.com
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Molecular Imprints
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Nanoimprint Lithography System
www.molecularimprints.com
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Litho Tech Japan
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Resist Analysis system
Lithography Process System
www.ltj.co.jp
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RDA(ARM) Series
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| The Resist Development Analyzer is the most-advanced 18-channel development rate analysis evaluation equipment. Using this system, you can promptly carry out developing characteristic analysis such as measurement of photoresists development rates and calculation of contrast curves and sensitivity. You can also accurately determine resist model parameters required for the lithography simulator.
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EXPOSURE SYSTEM
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Exposure tool for research and development of photoresists
Exposure with G,H,I-line,KrF,ArF, EUV & E-BEAM
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ELRC
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Repair, refurbish, service, and supply maintenance tooling for Cymer lasers series 5000, 6000, and 7000 series.
- ELRC provides a low cost solution for laser
operations
- Provide ALL parts necessary for your 5000, 6000
generation Cymer lasers
- Parts available for laser frame 7000 now and consumable
modules are to be ready by early 2012.
- Provide the parts, services, tools and training to be
your complete source for Cymer laser support.
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COPYRIGHT 2011,WESTPAC ALL RIGHT RESERVED