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Wafer Flatness Measurement |
- ULTRASORT150&200 - FlatMaster200 - FM-MSP300
Fully automated or manual, non-contact metrology tool designed for fast and accurate measurement of semiconductor wafers ranging in sizes from 2 inches to 8 inches in diameter.
Measurement Paramaters; Thickness, TTV, NTV, LTV, LTIR, BOW, WARP, SORI, SAG and STRESS etc |
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