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PVD Tool
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- Deposition of Metals, Piezoelectrics and Dielectrics
- Dual Magnetron (AC or DC powered)
- Single Magnetron (DC powered)
- RF diode
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Photonic Science
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- Scientific Detector Systems
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CIPTech
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- MTJ Measurement
- Manual, Semi-Auto, 200mm, 300mm
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SensArray in Situ Process Monitoring
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- In-situ temperature measurement & In-situ plasma properties measurment
- http://www.kla-tencor.com/chip-insituprocess.html
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MPII
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- Failiure Analysis
- below 20nm is avaiable (MPII-b/ LD)
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ISI
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| ISI provides a range of magnetic test solutions for the MRAM, semiconductor, data storage, and magnetic sensor industries.
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Multiprobe
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| - FA Analysis
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Corning Tropel
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- Surface Flatness Measurement System
- Industrial Metrology
* Flat Master, MSP
- Semiconductor
* Flat Master, UltraSort, UltraFlat
- www.corning.com
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