> Unique patented electrodeless Z-Pinch technology - Low debris / low consumable cost > 10 kHz pulse rate - Enables high volume manufacturing (HVM) simulation > Small plasma size - Below 1mm diameter
EQ-10HP
20 watt EUV source
>
- Low debris / low consumable cost
> 10 kHz pulse rate
- Enables high volume manufacturing (HVM) simulation
> Small plasma size
- Below 1mm diameter
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